Elaboration of nitride thin films by reactive sputtering
نویسندگان
چکیده
منابع مشابه
Nanocharacterization of titanium nitride thin films obtained by reactive magnetron sputtering
Titanium nitride thin films are used in applications such as tribological layers for cutting tools, coating of some medical devices (scalpel blades, prosthesis, implants etc.), sensors, electrodes for bioelectronics, microelectronics, diffusion barrier, bio-microelectromechanical systems (Bio-MEMS) and so on. This work is a comparative study concerning the influence of substrate temperature on ...
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ژورنال
عنوان ژورنال: Rem: Revista Escola de Minas
سال: 2006
ISSN: 0370-4467
DOI: 10.1590/s0370-44672006000200013